MEMS DEVICE AND MANUFACTURING METHOD THEREOF, AND ELECTRONIC APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method or the like of a MEMS element capable of forming the MEMS element while preventing erosion of a semiconductor element in the case of manufacturing a MEMS device wherein the MEMS element such as a micro resonator and the semiconductor element are formed on one and same substrate. SOLUTION: The manufacturing method of the MEMS device 80 wherein the MEMS element 10 and the semiconductor element 70 are formed on the substrate 50 includes the steps of: forming the semiconductor element 70 on the substrate 50; forming an acid resistance protection film 72 on the semiconductor element 70; and forming the MEMS element on the substrate 50. COPYRIGHT: (C)2006,JPO&NCIPI