| 摘要 |
PROBLEM TO BE SOLVED: To improve throughput when, in a coating and development apparatus, transfers of substrates positioned in each modules are shared by a plurality of substrate transferring means, referring a transfer schedule where its transfer cycle is arranged in series of time, and one turn is controlled to be shifted to the next module in order. SOLUTION: After one substrate transferring means completes its self-sharing transfer in one transfer cycle, forecasting the transfer schedule, the substrate transferring means waits in front of the top module of the self-shared transfer in the next transfer cycle. Thus, each cycles can be quickly carried out. COPYRIGHT: (C)2006,JPO&NCIPI
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