发明名称 |
Apparatus and method for determining a thickness of a deposited material |
摘要 |
Method and apparatus for determining a thickness of a deposited material. Energy is passed through the deposited material, wherein some of the energy is transmitted. The transmitted energy is received, and the received energy is used to determine a thickness of the deposited material.
|
申请公布号 |
US2005247877(A1) |
申请公布日期 |
2005.11.10 |
申请号 |
US20040839967 |
申请日期 |
2004.05.06 |
申请人 |
THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS |
发明人 |
MACKIN THOMAS J.;SAGER CHAD R. |
分类号 |
C23C14/54;G01B11/06;G01N21/59;(IPC1-7):G01N21/59 |
主分类号 |
C23C14/54 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|