发明名称 POLARIZATION-MODULATING OPTICAL ELEMENT
摘要 A polarization-modulating optical element (1) consisting of an optically active crystal material has a thickness profile where the thickness, as measured in th e direction of the optical axis, varies over the area of the optical element. The polarization-modulating optical element (1) has the effect that the plane of oscillation of a first linearly polarized light ray and the plane of oscillation of a second lin early polarized light ray are rotated, respectively, by a first angle of rotation and a second angle of rotation, with the first angle of rotation and the second angle of rotation being different from each other.
申请公布号 WO2005069081(A3) 申请公布日期 2005.11.10
申请号 WO2005EP00320 申请日期 2005.01.14
申请人 CARL ZEISS SMT AG;FIOLKA, DAMIAN;DEGUENTHER, MARKUS 发明人 FIOLKA, DAMIAN;DEGUENTHER, MARKUS
分类号 G02B1/08;G02B5/30;G02B27/28;G02F1/01;G03F7/20 主分类号 G02B1/08
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