发明名称 SYSTEM AND METHOD FOR MEASURING AND CONTROLLING ENERGY IN ULTRA-SHORT PULSES IN LASER BEAM
摘要 PROBLEM TO BE SOLVED: To provide a system for measuring and controlling the energy of the ultra-short pulses of laser beams. SOLUTION: The system for measuring the energy of ultra-short pulses in laser beams includes a half-wavelength plate for orienting the polarization of beams. A polarization beam splitter is used for reflecting one portion of each pulse in the beams, and the remaining part of the beams is transmitted directed toward a target. Energy at the reflected part is measured by a laser energy meter (LEM), and energy at the remaining part of beams is determined. An output signal from the LEM is used for obtaining an error signal, and the error signal can be used for rotating the half-wavelength plate for controlling the energy level at the remaining part of beams. In another embodiment, the second LEM in a beam splitter, having a fixed ratio, is used for measuring and controlling the energy at the remaining part of the laser beams. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2005315848(A) 申请公布日期 2005.11.10
申请号 JP20050032464 申请日期 2005.02.09
申请人 20 10 PERFECT VISION OPTISCHE GERAETE GMBH 发明人 SCHUHMACHER MICHAEL;SCHILLER MARKUS
分类号 G01J1/02;G01J1/42;G01J11/00;(IPC1-7):G01J1/02 主分类号 G01J1/02
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