发明名称 |
LIFT-OUT PROBE HAVING AN EXTENSION TIP, METHODS OF MAKING AND USING, AND ANALYTICAL INSTRUMENTS EMPLOYING SAME |
摘要 |
Extension tips for lift-out probes used in conjunction with focused ion beam (FIB) systems and analytical instruments employing such probes are disclosed. Methods of forming the extension tips from a variety of materials such as a silicon wafer, preformed whiskers of conductive material, and metal lines or contacts removed from integrated circuits are also disclosed. Methods of using a variety of extension tips pre-placed within the FIB system to enable reconditioning worn or damaged lift-out probes are also disclosed.
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申请公布号 |
US2005247886(A1) |
申请公布日期 |
2005.11.10 |
申请号 |
US20040838878 |
申请日期 |
2004.05.04 |
申请人 |
WANG SHIXIN |
发明人 |
WANG SHIXIN |
分类号 |
G01N1/28;G01N1/32;H01J37/20;(IPC1-7):H01J37/20 |
主分类号 |
G01N1/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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