NEW FLUORINE-CONTAINING FIVE-MEMBERED CYCLIC COMPOUND, AND POLYMER THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a polymer having high transparency and durability to short-wavelength light(e.g. ArF excimer laser with an oscillation wavelength of 193 nm, F2excimer laser with an oscillation wavelength of 157 nm) and useful as a pellicle material with excellent heat resistance and film formability, and to provide a new fluorine-containing five-membered cyclic compound useful as a monomer for the polymer.

SOLUTION: The new compound is represented by formula(a) in the figure. The polymer is composed of a unit of the formula(A) in the figure. In these formulas, X1to X5are each a fluorine atom or perfluoroalkyl group.

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