| 摘要 |
PROBLEM TO BE SOLVED: To control temperature efficiently and precisely when measuring thermal physical properties by maintaining a sample at a prescribed temperature and detecting the temperature response of the sample when the sample is heated unsteadily. SOLUTION: The sample 1 is directly brought into contact with a sample holder 2 for support. The sample holder 2 is heated by a heater 5 provided at the back side of the sample holder 2, heat is supplied to the sample 1 by thermal conductivity from the sample holder 2, the sample temperature at that time is detected by a temperature sensor 6, and the heat supply of the heater 5 is controlled by a control unit 7, thus maintaining the sample 1 at a prescribed temperature. In this manner, temperature is controlled by thermal conductivity via a sample holder, thus performing heating with improved efficiency, achieving improved temperature response properties, and accurately maintaining the sample at a prescribed temperature. In this case, laser beams 4 are applied to a surface 3 in the sample 1 from a light source 8, the temperature of the back of the sample 1 at that time is measured by a radiation thermometer 6 via a hole 10 in the heater 5 and a transparent sample holder 2, thus measuring the thermal physical properties of the sample by using the temperature response properties of a multilayer model. COPYRIGHT: (C)2006,JPO&NCIPI
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