VIBRATION RESISTANT INTERFEROMETRY

摘要

Scanning interferometry methods and related systems are described in which scanning interferometry data for a test object is provided. The data typically include intensity values for each of multiple scan positions for each of different spatial locations of the test object. The intensity values for each spatial location typically define an interference signal for the spatial location. The intensity values for a common scan position typically define a data set for that scan position. Scan values are provided for each scan position. In general, scan value increments between various scan values are non-uniform (e.g., different). Information is determined about the test object based on the scanning interferometry data and scan values. Typically, the determination includes transforming at least some of the interference signals into a frequency domain with respect to the scan values.