ELECTROMECHANICAL FILTER

摘要

An electromechanical filter which can be small-sized and highly integrated to make a highly sensitive signal detection. The electromechanical filter uses a quantum element at a detection unit to realize a fine and highly sensitive detection. The electromechanical filter comprises a micro-vibrator (101) capable of resonating with a signal inputted, and a detecting electrode (103) arranged at a predetermined spacing from the micro-vibrator so that a highly sensitive detecting mechanism having been difficult in the prior art is realized by detecting a change in the electrostatic capacity between the micro-vibrator and the detecting electrode.