PRODUCING METHOD OF MASK MANUFACTURING DATA, AND PRODUCING APPARATUS FOR PROGRAM AND MASK MANUFACTURING DATA

摘要

PROBLEM TO BE SOLVED: To save the processing period of time at producing of mask manufacturing data again.

SOLUTION: A mask screen 21, on which a block for integrated exposure is arranged, based on already existing manufacturing data, is shown (step S1). The selection of the block from a user, for example, is received by an input device and a selected block screen 22 with the selected block arranged therein is shown on an indication device 20 (step S2). The selection of the block, arranged on the selected block screen 22 from the user, for example and the designation of an arranging position on the mask screen 21 with the selected block arranged therein, are received by the input device, to indicate the selected block on the designated arranging position (step S3). New mask manufacturing data are produced, based on the indicated mask screen 21 (step S5).

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