发明名称 |
ELECTRONIC COMPONENT HOLDER, ITS MANUFACTURING PROCESS, AND METHOD FOR TAKING OUT ELECTRONIC COMPONENT FROM ELECTRONIC COMPONENT HOLDER |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electronic component holder capable of suppressing complication of arrangement or manufacturing process and eliminating possibility of cost increase or generation of a lot of wastes, and to provide its manufacturing process, and a method for removing an electronic component from the electronic component holder. <P>SOLUTION: The electronic component holder comprises a supporting substrate 1, and an elastic elastomer layer 3 formed on the surface of the supporting substrate 1 and tightly holding a silicon wafer W removably. A plurality of conduction passages 2 of air for partially deforming the flat surface of the elastomer layer 3 are bored through the supporting substrate 1 in the internal thickness direction. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
申请公布号 |
JP2005317651(A) |
申请公布日期 |
2005.11.10 |
申请号 |
JP20040131640 |
申请日期 |
2004.04.27 |
申请人 |
SHIN ETSU POLYMER CO LTD |
发明人 |
ODAJIMA SATOSHI;NOGAMI TAKASHI;HOSONO NORIYOSHI |
分类号 |
H05K13/04;H01L21/68;H01L21/683 |
主分类号 |
H05K13/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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