发明名称 |
Selective dry etching of tantalum and tantalum nitride |
摘要 |
The invention describes a method for the selective dry etching of tantalum and tantalum nitride films. Tantalum nitride layers ( 30 ) are often used in semiconductor manufacturing. The semiconductor substrate is exposed to a reducing plasma chemistry which passivates any exposed copper ( 40 ). The tantalum or tantalum nitride films are selectively removed using an oxidizing plasma chemistry.
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申请公布号 |
US2005250337(A1) |
申请公布日期 |
2005.11.10 |
申请号 |
US20050179316 |
申请日期 |
2005.07.12 |
申请人 |
EISSA MONA M;YOCUM TROY A |
发明人 |
EISSA MONA M.;YOCUM TROY A. |
分类号 |
H01L21/3065;C23F4/00;H01L21/321;H01L21/3213;H01L21/44;H01L21/768;(IPC1-7):H01L21/44 |
主分类号 |
H01L21/3065 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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