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发明名称
Metallischer Werkstoff für elektronische Bauelemente, elektronische Bauelemente, elektronische Geräte und Verfahren zum Behandeln metallischer Werkstoffe
摘要
申请公布号
DE60022951(D1)
申请公布日期
2005.11.10
申请号
DE2000622951
申请日期
2000.07.07
申请人
SONY CORP., TOKIO/TOKYO;FURUYAMETALS CO., LTD.
发明人
UENO, TAKASHI;ARATANI, KATSUHISA
分类号
C23C14/34;C22C5/06;G02F1/1335;H01L21/203;H01L21/306;H01L23/532;H05K1/09;(IPC1-7):C22C5/06
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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