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发明名称
Plasma processing method and system therefor
摘要
申请公布号
AU2004319231(A1)
申请公布日期
2005.11.10
申请号
AU20040319231
申请日期
2004.08.30
申请人
PEARL KOGYO CO., LTD.
发明人
NOBORU SAEKI
分类号
H01T19/00;B01J19/08;C08J7/00;H01L21/304;H01L21/3065;H05H1/24;H05H1/46
主分类号
H01T19/00
代理机构
代理人
主权项
地址
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