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发明名称
DIELEKTRISCHE FILME UND DEREN HERSTELLUNGSVERFAHREN
摘要
申请公布号
DE60015578(T2)
申请公布日期
2005.11.10
申请号
DE20006015578T
申请日期
2000.08.28
申请人
MICRON TECHNOLOGY, INC.
发明人
BASCERI, CEM;GEALY, DAN
分类号
C23C16/40;H01L21/02;H01L21/314;H01L21/316;H01L21/8242;H01L27/108;(IPC1-7):C23C16/40;H01G4/12;H01B3/12;C04B35/468;C04B35/47;C04B35/472
主分类号
C23C16/40
代理机构
代理人
主权项
地址
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