TREATMENT METHOD USING DIELECTRIC BARRIER DISCHARGE LAMP

摘要

PROBLEM TO BE SOLVED: To provide a treatment method using a dielectric barrier discharge lamp by which various treatments are carried out in a high grade at a high speed with high efficiency. SOLUTION: A material to be treated are brought into contact with a treating fluid containing at least oxygen and is treated by a 1st dielectric barrier lamp and a 2nd dielectric barrier lamp which emit ultraviolet rays each having a different wave length and ozone is produced by the irradiation with the ultraviolet ray from the 1st dielectric barrier discharge lamp and active oxygen is produced by the irradiation with the ultraviolet ray from the 2nd dielectric barrier discharge lamp. Decomposition and activation are carried out by the irradiation of ultraviolet ray emitted from the 1st dielectric barrier discharge lamp and reactivation is carried out by the irradiation of ultraviolet ray emitted from the 2nd dielectric barrier discharge lamp to treat the material to be treated by bringing the material into contact with the treating fluid. COPYRIGHT: (C)2006,JPO&NCIPI