| 摘要 |
PROBLEM TO BE SOLVED: To improve a workability by changing the setting operations of treating conditions during treatments before a treatment start and after the treatment start by treatment equipment into proper techniques corresponding to each status. SOLUTION: A plurality of settable treating conditions are displayed in parallel on a display screen, the treating conditions are set from the outside to a plurality of the treating conditions displayed on the display screen, and the treatments are started before the treatment start. A plurality of the settable treating conditions are successively displayed circularly on a display device one by one in response to specified operations from the outside, and the treating conditions displayed on the display device are set when the treatments at each treating unit are started and each subsequent treating unit is treated during the carrying out of the treatments. Thus, the workability is improved by making the method for setting the treating conditions differ before the treatment start and during the treatments. COPYRIGHT: (C)2006,JPO&NCIPI
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