| 摘要 |
PROBLEM TO BE SOLVED: To provide a contact load regulator capable of restraining a size from getting large, and capable of obtaining a weak and constant contact load by simple constitution, and a shape measuring machine equipped therewith. SOLUTION: This contact load regulator for regulating the contact load of a probe 3 contacting with a measured face W is provided with a support means 6 for supporting the probe 3 movably along an axial direction of the probe 3 by a dead weight of a member including the probe 3, and a fluid supply suction means 10 for supplying or sucking all the time a fluid toward a periphery of the probe 3 to make the fluid flow along the axial direction of the probe 3. COPYRIGHT: (C)2006,JPO&NCIPI
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