Simultaneous control of deposition time and temperature of multi-zone furnaces

摘要

The present invention facilitates multi-zone furnace ( 102 ) based deposition processes by iteratively adjusting deposition time and zonal setpoint temperatures to mitigate deviations from desired target thickness(es). Coupled feedback loops are employed to update the deposition time ( 520 ) and the zonal setpoint temperatures ( 510 ) lot to lot and batch to batch while mitigating deviations fro the desired target thickness(es). Error checking is performed by computing an error metric ( 506 ) and only updating the setpoint temperatures on the error metric being within an acceptable value ( 508 ). Additionally, an excitation parameter ( 512 ) is determined that indicates variations in furnace operation.