发明名称 Method and an element for surface polishing
摘要 A surface polishing method in which a workpiece having at least one surface for polishing is set into rotation and has said surface pressed against a polishing element that is driven with motion in rotation or in translation, wherein said surface of the workpiece presents points that are situated outside a circumference of center coinciding with the center of rotation of the workpiece and traveling, during one revolution of said workpiece, along a path comprising first and second portions, with the rate of polishing over said second portion being smaller than over said first portion, in such a manner as to compensate for an over-polishing effect that occurs on the edge of said workpiece over said first portion of the path.
申请公布号 US2005250426(A1) 申请公布日期 2005.11.10
申请号 US20050122359 申请日期 2005.05.05
申请人 SOCIETE EUROPEENNE DE SYSTEMES OPTIQUES 发明人 FERME JEAN-JACQUES
分类号 B24B37/04;H01L21/304;H01L21/306;(IPC1-7):B24B1/00 主分类号 B24B37/04
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