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发明名称
VERFAHREN ZUR ERZEUGUNG EINER EXTREM-ULTRAVIOLETT-STRAHLUNGSQUELLE UND DEREN ANWENDUNG IN DER LITHOGRAPHIE
摘要
申请公布号
DE60015593(T2)
申请公布日期
2005.11.10
申请号
DE20006015593T
申请日期
2000.11.14
申请人
COMMISSARIAT A L'ENERGIE ATOMIQUE, PARIS
发明人
BABONNEAU, DANIELE;MARMORET, REMY;BONNET, LAURENCE
分类号
G21K5/08;G03F7/20;G21K5/02;G21K7/00;H01L21/027;H05G2/00;(IPC1-7):H05G2/00
主分类号
G21K5/08
代理机构
代理人
主权项
地址
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