FLUORESCENT X-RAY ANALYSIS METHOD AND FLUORESCENT X-RAY ANALYSIS DEVICE

摘要

It is possible to solve the problem of the conventional fluorescent X-ray analysis that a concentration calculation result can be obtained only after elapse of a time set as a measurement time. In the fluorescent X-ray analysis method and the fluorescent X-ray analysis device according to the present invention, a sample measurement condition is set before starting the measurement and the measurement concentration of the element contained in the sample and the measurement accuracy are calculated. When the measurement accuracy has become a value satisfying the predetermined measurement condition, the measurement is terminated and the concentration at that moment is outputted.