OPTICAL ASSEMBLY STRUCTURE COMPRISING A CONNECTING BODY WITH THERMAL EXPANSION COMPENSATION MEANS
摘要
<p>An optical assembly comprises a connecting body (1) consisting of at least a first and a second part (3, 4), the body (1) being connected to an assembly means (2) of a ceramic material wherein the assembly means (2) consists of at least a first and a second part (17, 18) separated by a gap (19).</p>
申请公布号
WO2005106557(A1)
申请公布日期
2005.11.10
申请号
WO2004EP09384
申请日期
2004.08.22
申请人
CARL ZEISS SMT AG;KWAN, YIM-BUN, PATRICK;XALTER, STEFAN;MORRISON, FRASER;WIJCKMANS, MAURICE;KENDALL, DAVID
发明人
KWAN, YIM-BUN, PATRICK;XALTER, STEFAN;MORRISON, FRASER;WIJCKMANS, MAURICE;KENDALL, DAVID