| 摘要 |
PROBLEM TO BE SOLVED: To provide a vertical housing type cassette capable of housing a plurality of substrates in a very dense state and capable of easily taking in and out the substrate between a vertical-transfer-type substrate transferring devices. SOLUTION: The substrate housing system 1 comprises the vertical housing type cassette 10 for housing the substrate 50 in an orthogonal state. Various substrate supporting boards 16, 16', 16" are arranged on a front surface side wall 13, a back surface side wall 14, and a bottom surface side wall 15 of the vertical housing type cassette 10 to support a front surface side back surface part, a back surface side edge, and a downside edge of the substrate 50. When the substrate 50 is taken out from the cassette 10, the wall 13 is in an open state, and the substrate 50 is transferred in an orthogonal state toward the front surface side along the plane direction of a pair of side surface side walls 11, 12 of the cassette 10 with the downside edge of the substrate 50 guided by each roller 18 of the board 16" arranged on the wall 15 and each roller 18 of the board 16 arranged on the wall 13. COPYRIGHT: (C)2006,JPO&NCIPI |
