发明名称 |
STRAIN SENSORS BASED ON NANOWIRE PIEZORESISTOR WIRES AND ARRAYS |
摘要 |
A highly sensitive and ultra-high density array of electromechanical nanowires is fabricated. Nanowires are extremely sensitive to the strain induced by the attachment of biological and chemical species. Real-time detection is realized through piezoresistive transduction from the specially designed materials that form the nanowires. These specially designed materials include doped silicon or germanium, doped III-V semiconductors such as GaAs, GaN and InAs systems, and ultra-thin metal films. |
申请公布号 |
WO2005106417(A2) |
申请公布日期 |
2005.11.10 |
申请号 |
WO2004US39302 |
申请日期 |
2004.11.24 |
申请人 |
CALIFORNIA INSTITUTE OF TECHNOLOGY;TANG, HONGXING;ROUKES, MICHAEL, L. |
发明人 |
TANG, HONGXING;ROUKES, MICHAEL, L. |
分类号 |
G01B5/28;G01L1/00;G01L1/18;G01L1/20;G01L19/04;G01N13/16;G12B21/08 |
主分类号 |
G01B5/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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