| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a member for exposure, having information used for control of operation in an exposure device, and to provide the exposure device equipped with the member for exposure installed therein. <P>SOLUTION: An IC chip card 30 is attached to an end surface point of a reticle R as the member for exposure. Various kinds of information, relating to the reticle R used for control of the operation in the exposing device 10, are recorded to the IC chip 31 of the IC chip 31. For example, the drawing error information of the circuit pattern on a pattern surface PA, the information on the mapped amount of deformation of the reticle R placed on the reticle stage RS, the history information of the reticle R (the date of manufacture, number of exposure times, date of the final washing of the reticle R, etc.), and the identification information of the reticle R, etc., are recorded thereto. The information, recorded to the IC chip 31, is read by a reader 35, and the information read is immediately sent to a main controller unit 19. The imaging characteristics of a projection optical system 14 are controlled, based on the information and the relative positional relation of the reticle R and a wafer W is controlled. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
