| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a defect inspecting/classifying apparatus for imaging an inspected object, outputting an image containing a defect, extracting a defect region, comparing it with a database grouped with similar feature information, outputting defect classification information, easily discriminating between a flaw and dust attached on a substrate, or surely predicting the quantity of radiation from a laser for repair. <P>SOLUTION: In the defect inspecting/classifying apparatus, the inspected object 12 is imaged by an objective lens 14 and an image sensor 15, the detected image 16 containing the defect is outputted, the defect region is extracted, the feature information is numerically converted and compared with the database grouped with the similar feature information, and a defect classification code 25 is outputted. The defect inspecting/classifying apparatus is provided with confocal optical systems 18, 19b, 20, 21 for measuring and acquiring height information or three-dimensional information of the defect object. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
