发明名称 Semiconductor storage device and its manufacturing method
摘要 A semiconductor storage device comprises a semiconductor substrate; a memory cell block including a plurality of transistors formed on the semiconductor substrate, said plurality of transistors being connected in series by serial connection of a source and a drain of two neighboring transistors; first electrodes which are electrically connected to the source or drain of two neighboring transistors; a ferroelectric film deposited on sidewalls of the first electrodes to retain a gap in a central portion between two neighboring first electrodes; and second electrodes buried in the gaps and insulated from the electrodes of the transistors.
申请公布号 US2005248975(A1) 申请公布日期 2005.11.10
申请号 US20040951673 申请日期 2004.09.29
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 OZAKI TORU
分类号 H01L27/105;G11C11/22;H01L21/8246;H01L27/115;(IPC1-7):G11C11/22 主分类号 H01L27/105
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