发明名称 |
КОНСТРУКЦИЯ ОТРАЖАТЕЛЬНОГО ПРОСТРАНСТВЕННОГО МОДУЛЯТОРА СВЕТА |
摘要 |
A micro-mirror array fabricated on one substrate is bonded to a second substrate that includes addressing electrodes and control circuitry. In one embodiment, the micro mirror array is fabricated from a substrate that is a single crystal material. There is enough area beneath the micro mirror array for electrodes and control circuitry, including memory buffers and a pulse width modulation array to be fabricated on the second substrate. |
申请公布号 |
RU2004118060(A) |
申请公布日期 |
2005.11.10 |
申请号 |
RU20040118060 |
申请日期 |
2003.05.30 |
申请人 |
МИРАДИА,ИНК. (US) |
发明人 |
ПАНЬ Шаохэж С. (US);ЧЭНЬ Дунминь (US);ЯН С о (US);ЧЖАН Шоучэн (US) |
分类号 |
G09G5/00;G02B26/08;G05D25/02;G09G3/20;G09G3/34 |
主分类号 |
G09G5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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