| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide such surface treatment method and surface treatment device of a fuel cell that make (1) the area of a separator on which, a surface treatment is to be applied not shift even a mask and a work expand by the heat generated at sputtering treatment, and make (2) the above area not blurred by the thickness of the mask. <P>SOLUTION: (1) The surface treatment method and surface treatment device of a fuel cell comprises a first process of laying the mash 2 on the work for the fuel cell separator 1 having a face on which, partial surface treatment is applied, and a second process applying sputtering treatment. In the first process, at the position of edge part of the work, the work and the mask are made to touch a standard 5 in the work inward direction, and made free to move in the direction moving away from the standard 5. (2) The thermal expansion of the work 1 and the mask 2 are made coincide with each other. (3) The thickness of the mask 2 is made thin to the level of not creating shade at sputtering. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
