METHOD TO ELIMINATE DEFECT ON PERIPHERY OF SLIDER DUE TO CONVENTIONAL MACHINING PROCESS

摘要

PROBLEM TO BE SOLVED: To provide a machining method of a slider in a manufacturing method of the slider of a magnetic hard disk drive.

SOLUTION: This machining method of the slider comprises: (1) a step that the slider 104 is diced out of a row bar; (2) a step that a jet of clean air dries the slider; (3) a step that a laser 502 guided by a jet of water 504 micro-grinds the periphery of the slider; (4) a step that the edges of the slider and the corners of the leading edge is rounded to a pre-determined radius; and (5) a step that the slider is cleaned with de-ionized water, then dried in a high temperature furnace.

COPYRIGHT: (C)2006,JPO&NCIPI