| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method capable of aligning a repeated pattern even without setting a marker point for alignment in a laser beam machining device. <P>SOLUTION: A temporary center is decided as the intersection of the vertical bisector in the chord of a circular work, and the temporary center is aligned with the center of rotation. The position of each unit element composing a repeated pattern is obtained by pattern matching, thus the angle of inclination (crude angle) in the repeated pattern is obtained as the mean value of the inclinations in a plurality of lines, and the inclination is corrected by the crude angle. Further, the angle of inclination (precise angle) in a straight line connecting the temporary center and the point at the position of the edge part separated by the integer multiple of the unit element to an x axis from the temporary center is obtained, and the inclination is corrected with the precise angle, thus the inclination of the repeated pattern is perfectly compensated. Thereafter, a true center is detected from the relative positional relation between the intersection of a street which can be made into the true center and the unit element, and the positional relation between the unit element and the temporary center, and the position of the true center is aligned with the center of rotation. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
