| 摘要 |
PROBLEM TO BE SOLVED: To provide a groove machining device of a sleeve member capable of discharging sludge in an excellent state without short-circuit of the sleeve member and a machining electrode, and changing the number of dynamic pressure fluid grooves and the groove widths, even if using a one machining electrode. SOLUTION: This groove machining device is provided with a chuck 10 for holding the sleeve member P, a circular-arc shaped electrode 20A having a fan-shape in cross section and formed with at least a machining electrode 23 on a partial circumference surface of a circumference sharing a center of a hollow circle of the sleeve member P, a Z-axis driving device 4 for moving the circular-arc shaped electrode 20A to a prescribed position of an axial direction at the inside of the sleeve member P, an XY stage 3 for moving the circular-arc shaped electrode 20A to a position adjacent to an inner peripheral surface of the sleeve member P from the prescribed position and in the opposite direction, a C-axis rotating device 7 for rotating the circular-arc shaped electrode 20A at a prescribed angle, and a power source 15 capable of impressing prescribed voltage between the chuck 10 and the circular-arc shaped electrode 20A. COPYRIGHT: (C)2006,JPO&NCIPI
|
