| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing device of a display device which is capable of forming a thin film to constitute a display element stably and with a high quality, and which can suppress reduction of production yield. SOLUTION: This is the manufacturing device to produce the display device provided with a plurality of display elements on the main face of the plate board, and provided with a housing part 304 that has an aperture which houses the material source in order to form the thin film to constitutes the display element, and in which the evaporated material source is scattable, a movement mechanism 308 which makes the plate board 400 or the housing part 304 move so that the aperture of the housing part 304 is opposed against the plate board main face 401 and scanning is made along the plate board main face, and an eaves part 306 to control the aperture area of the aperture coping with a vapor deposition rate of the material source when it is scattered from the aperture of the housing part 304 and vapor-deposited on the plate board main face 401. COPYRIGHT: (C)2006,JPO&NCIPI
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