发明名称 Flash memory device and method for fabricating the same
摘要 A flash memory device and a method for fabricating the same is disclosed that reduces or prevents mis-operation and improves integration, which includes a semiconductor substrate having a field region and an active region; a device isolation layer on the field region including a conductive (e.g., polysilicon) layer and an insulating layer thereon; a sidewall spacer at sides of the device isolation layer; an ONO layer on the active region; a gate electrode on the ONO layer; source and drain regions at sides of the gate electrode in the active region; a passivation layer on the semiconductor substrate, having a contact hole in the drain region; and a drain electrode in the contact hole, connected with the drain region.
申请公布号 US2005247987(A1) 申请公布日期 2005.11.10
申请号 US20050121495 申请日期 2005.05.03
申请人 DONGBUANAM SEMICONDUCTOR, INC. 发明人 LEE SANG B.
分类号 H01L21/8247;H01L21/336;H01L21/8246;H01L27/115;H01L29/788;H01L29/792;(IPC1-7):H01L21/336 主分类号 H01L21/8247
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