摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a treatment method capable of suppressing electrification of a lithium tantalate single crystal and a lithium niobate single crystal without impairing their piezoelectric properties, and an apparatus capable of simply practicing the treatment method. <P>SOLUTION: This method comprises the steps of accommodating a wafer 50 prepared from the lithium tantalate single crystal or the lithium niobate single crystal and a reducing agent 60 containing an alkali metal compound in a treatment vessel 2, and holding the vessel 2 at a temperature of≥200°C and≤1,000°C to reduce the wafer 50. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |