| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processing apparatus and a substrate processing method prolonging the life of a drug solution of which the performance is deteriorated owing to moisture absorption. SOLUTION: Water in the atmosphere is removed by a dry filter 1 provided on an upper part of a processing container 2, and dry air is introduced into the processing container 2. The dry air introduced into the processing container 2 is exhausted from an exhaust line 11. The substrate 5 is processed with the drug solution by supplying a drug solution 6 deteriorated in performance owing to moisture absorption onto the substrate 5 from a supply nozzle 3 penetrating the side wall of the processing container 2 while rotating the substrate 5 utilizing a rotating stage 7 after producing the flow of the dry air in the processing container 2. COPYRIGHT: (C)2006,JPO&NCIPI
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