| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray generating part and its manufacturing method which reduce the foreign matter quantity in an insulating oil. SOLUTION: The X-ray generating part has an X-ray tube to generate X-ray, a case 11 to accommodate the X-ray tube, and the insulating oil filled in the case. The NAS clarification degree management class of the foreign matter quantity in the insulating oil is set to be class 3 to class 00. The X-ray generating part is obtained, for example, by a following method. The case of the X-ray generating part is disposed in a vacuum chamber. A circulation path is formed through which the case, a canned motor pump and a filter are connected. The insulating oil is pored in the vacuum chamber such that the case 11, the canned motor pump 70 and the filter 80 are positioned lower than the level of the insulating oil 200. The interior of the vacuum chamber 100 is held at a predetermined vacuum state, and the canned motor pump is driven to circulate the insulating oil in the circulation path, thereby removing the foreign matter in the insulating oil through the filter 80. COPYRIGHT: (C)2006,JPO&NCIPI
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