发明名称 |
METHOD AND DEVICE FOR FORMING A BODY HAVING A THREE-DIMENSIONAL STRUCTURE |
摘要 |
Only one spherical fine particle 1 is fed from a cartridge 2. The particle 1 is held by a precision manipulator 3. The diameter of the particle 1 is measured by a measuring device 6 to detect the central position of the particle 1. The particle 1 is moved by using an X-Y-Z stage and a roughly moving part of the manipulator 3 such that the center of the particle 1 nearly corresponds to the target position to bring the particle 1 into contact with other particles neighboring thereto. Laser beams are irradiated to the contact areas of the particles to fuse these areas. The particle is moved slightly and precisely by using a precisely moving part of the manipulator 3 so that the center of the particle absolutely corresponds to the target position before the fused areas thereof become hard. The particle 1 is then released from the manipulator 3. The above processes are repeated sequentially after the fused areas becomes hard. |
申请公布号 |
EP1525085(B1) |
申请公布日期 |
2005.11.09 |
申请号 |
EP20030771299 |
申请日期 |
2003.07.24 |
申请人 |
KAWASAKI, AKIRA;J-TEC, INC |
发明人 |
KAWASAKI, AKIRA |
分类号 |
B81C3/00;B22F3/00;B23K3/06;B29C67/00;H01L21/98;H05K3/34 |
主分类号 |
B81C3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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