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发明名称	SUBSTRATE CLEANING SYSTEM
摘要
申请公布号	KR20050106207(A)	申请公布日期	2005.11.09
申请号	KR20040031370	申请日期	2004.05.04
申请人	SEMES CO., LTD.	发明人	PARK, SUN YONG;JEON, YONG KWANG
分类号	H01L21/304;(IPC1-7):H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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