| 摘要 |
<p>The invention presents a mass flow controller capable of supplying always stably at desired flow rate in spite of pressure fluctuations at either upstream side or downstream side of the mass flow controller. <??>The invention is a mass flow controller having a flow rate control valve and a flow rate sensor, more specifically comprising a pressure control valve disposed at the upstream side of the flow rate control valve, a pressure sensor disposed between this pressure control valve and the flow rate control valve, and a controller for controlling the pressure control valve by feeding back the output of this pressure sensor. <IMAGE></p> |
