发明名称 DISPENSER CATHODE
摘要 A dispenser cathode which comprises an emission surface (4), a reservoir for material releasing (2), when heated, work-function-lowering particles, and at least one passage (7) for allowing diffusion of work-function-lowering particles from said reservoir to said emission surface, said emission surface comprising at least one emission area (9) and at least one non-emission area (8) covered with emission-suppressing material and surrounding each emission area, said non-emission area comprising at least one passage connecting said reservoir with said non-emission area and debouching within a diffusion length distance from an emission area for allowing diffusion of work-function-lowering particles from said reservoir to said emission area.
申请公布号 EP1593140(A2) 申请公布日期 2005.11.09
申请号 EP20040711065 申请日期 2004.02.13
申请人 MAPPER LITHOGRAPHY IP B.V. 发明人 KRUIT, PIETER;STEENBRINK, STIJN WILLEM HERMAN KAREL
分类号 H01J1/28;(IPC1-7):H01J1/28 主分类号 H01J1/28
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