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发明名称
PURGED HEATER-SUSCEPTOR FOR AN ALD/CVD REACTOR
摘要
申请公布号
EP1593147(A1)
申请公布日期
2005.11.09
申请号
EP20040710303
申请日期
2004.02.11
申请人
GENUS, INC.
发明人
DOERING, KEN;KUBANI, MIKE;KIM, GI, YOUL;FOOTE, DAVID
分类号
C23C16/44;C23C16/455;C23C16/458;C23C16/46;F27B5/14;F27B17/00;F27D11/00;H01L21/00;H01L21/687;H05B3/10;H05B3/68;(IPC1-7):H01L21/00
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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