PIEZOELECTRIC SINGLE CRYSTAL ELEMENT AND PROCESS FOR FABRICATING THE SAME

摘要

A piezoelectric single crystal element in which the electromechanical coupling coefficient k31 of oscillation mode in lateral direction of not lower than 60% can be attained stably, and its fabricating process. Assuming the direction of polarization (3) is the [110] axis of pseudo-cubic system, normal direction (1) of the end face (10c) of the piezoelectric element exists in an angular range of ±35˚ of the [001] axis including the [001] axis substantially orthogonal to the direction of polarization (3), and the electromechanical coupling coefficient k31 of oscillation mode in a direction orthogonal to the direction of polarization (3), in a so-called lateral direction, is not lower than 60%.