Abrasive plate holder

摘要

The abrasive machine of the present invention is capable of controlling a shape of an abrasive face (12c) of a small abrasive plate (12). The abrasive machine comprises: a plate holder (14) holding the abrasive plate (12); a fixed engaging member (20) being fixed to the plate holder (14) and engaging with the abrasive plate (12); a first O-ring (22a) being provided between the fixed engaging member (20) and the abrasive plate (12); a second O-ring (22b) being provided between the plate holder (14) and the abrasive plate (12); and a fluid supply-discharge mechanism (48) for supplying a fluid to and discharging the same from a zone (40) enclosed by the abrasive plate (12), the plate holder (14) and the second O-ring (22b). An outer circumferential face (12b) of the abrasive plate (12) is separated from an inner circumferential face (20c) of the fixed engaging member (20).