Lactone Ring-Containing Methacrylate, Polymer Thereof, Resist Composition and Patterning Process,申请号KR20020019213-传众专利搜索

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发明名称	Lactone Ring-Containing Methacrylate, Polymer Thereof, Resist Composition and Patterning Process
摘要
申请公布号	KR100526736(B1)	申请公布日期	2005.11.08
申请号	KR20020019213	申请日期	2002.04.09
申请人		发明人
分类号	G03F7/027;C07D307/00;C08F220/18;C08F220/28;G03F7/004;G03F7/039;(IPC1-7):G03F7/027	主分类号	G03F7/027
代理机构		代理人
主权项
地址

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