发明名称 Sealing apparatus having a single groove
摘要 A sealing apparatus includes a sealing arrangement and a groove in a base. The sealing arrangement may comprise an o-ring and a grounding gasket where both the o-ring and the grounding gasket partially protrude in a longitudinal direction from the groove. Thus, the grounding gasket, which is equipped with ends that can be pulled out of the groove, can be removed from the groove by a pulling force. This leaves the o-ring accessible for removal or maintenance at a much lower cost in terms of manufacturing and operational costs. The sealing arrangement may also include inner and outer o-rings which seal a fluid flow from the atmosphere.
申请公布号 US6962348(B2) 申请公布日期 2005.11.08
申请号 US20030627599 申请日期 2003.07.28
申请人 TOKYO ELECTRON LIMITED 发明人 FINK STEVEN T.
分类号 F16J15/06;(IPC1-7):F16L17/06 主分类号 F16J15/06
代理机构 代理人
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