| 发明名称 |
Variable contact method and structure |
| 摘要 |
A method of forming a variable contact structure, and the structure so formed, comprising forming a via within the device, wherein a diameter of the via is variably determined depending upon the number of wires to be contacted.
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| 申请公布号 |
US6962875(B1) |
申请公布日期 |
2005.11.08 |
| 申请号 |
US20040710000 |
申请日期 |
2004.06.11 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
STAMPER ANTHONY K. |
| 分类号 |
H01L21/02;H01L21/44;H01L21/768;H01L23/522;(IPC1-7):H01L21/44 |
主分类号 |
H01L21/02 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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