发明名称 |
Method of manufacturing an electroconductive film, and an apparatus including it |
摘要 |
In a method of manufacturing an electroconductive film, a developing process is implemented on a photosensitive paste layer ( 12 ) having a height of about 13 mum in a state where exposure is repeated twice in FIG. 1 D, and thereafter, a baking process is completed to form a wiring pattern ( 20 ). As a result, the curling of an edge formed in the wiring pattern ( 20 ) can be remarkably reduced.
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申请公布号 |
US6962770(B2) |
申请公布日期 |
2005.11.08 |
申请号 |
US20010951612 |
申请日期 |
2001.09.14 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
UDA YOSHIMI;ISHIWATA KAZUYA;KUBO SHINSAKU;WATANABE YASUYUKI |
分类号 |
H01J9/02;H05K1/09;H05K3/02;H05K3/24;(IPC1-7):G03F7/20;G03F7/16;G03F7/22;G03F7/26;G03F7/40 |
主分类号 |
H01J9/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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