发明名称 Method of manufacturing an electroconductive film, and an apparatus including it
摘要 In a method of manufacturing an electroconductive film, a developing process is implemented on a photosensitive paste layer ( 12 ) having a height of about 13 mum in a state where exposure is repeated twice in FIG. 1 D, and thereafter, a baking process is completed to form a wiring pattern ( 20 ). As a result, the curling of an edge formed in the wiring pattern ( 20 ) can be remarkably reduced.
申请公布号 US6962770(B2) 申请公布日期 2005.11.08
申请号 US20010951612 申请日期 2001.09.14
申请人 CANON KABUSHIKI KAISHA 发明人 UDA YOSHIMI;ISHIWATA KAZUYA;KUBO SHINSAKU;WATANABE YASUYUKI
分类号 H01J9/02;H05K1/09;H05K3/02;H05K3/24;(IPC1-7):G03F7/20;G03F7/16;G03F7/22;G03F7/26;G03F7/40 主分类号 H01J9/02
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